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optical scatterometer [1 record]

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Alphabetical list of terms

Record 1 2008-05-23

English

Subject field(s)
  • Scientific Instruments
  • Range Measurements (Telecommunications)
DEF

An active sensor used for the measurement of the backscattered field of a laser illuminated surface.

CONT

The facility is a class 10,000 cleanroom and contains a unique, state-of-the-art, out-of-plane optical scatterometer. This scatterometer is capable of measuring the bi-directional scatter distribution function ( BSDF) of transmissive or reflective, specular or diffuse optical elements and surfaces in addition to granular, powdered, or liquid samples.

French

Domaine(s)
  • Instruments scientifiques
  • Mesures à distance (Télécommunications)
DEF

Capteur actif permettant de mesurer le signal rétrodiffusé d'une surface illuminée par un laser.

Spanish

Campo(s) temático(s)
  • Instrumentos científicos
  • Medidas de distancia (Telecomunicaciones)
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